Micro-print and nano-imprint methods combining laser-drilled screen printing and ultraviolet nanoimprint lithography: a review

Abstract Ultraviolet (UV) nanoimprint lithography consists of molding–demolding and lithographic etching processes, which enable the shape transfer molded resist patterns to underlying substrate surfaces. UV has been applied in various fields, including optics, electronics, biology, energy engineering. An important key through masks is level thicknesses thin residual layers. To solve this issue, region-selective placement UV-curable droplets on a effective for leveling thickness layer regardless differences mold pattern density. Herein, we developed laser-drilled screen printing that allows quantitative high-viscosity liquids surfaces via using polyimide through-hole stencil mask prepared ultrashort-pulse laser drilling. This review explains practical demonstrations involving printing: nano/micro fabrication Au split ring resonators, four-terminal electrodes, silicon line patterns.